SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//...
Available to Order
tech sheet
Details
Height mm
38
Seal Material
FKM
Body Material
Aluminium
Feature
Bellows seal
Length mm
60
Width mm
108
Ambient Temperature
5 to 60°C
Valve Material
Aluminium
Manufacturer
SMC
Angle
Angle valve
Series
XL2
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Actuation
Single acting
Operation
Normally Closed
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Seal Type
Length mm
Width mm
Height mm
Operation
Feature
Flange Specification
Actuation
Buy Price
High Vacuum
Bellows Seal
–
–
–
Normally Closed
–
–
–
Available to Order
–
–
110
185
79
–
–
–
–
Available to Order
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Available to Order
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications requiring minimal contamination and corrosion resistance
Bellows Seal
–
–
–
Normally Closed
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
KF NW
Single acting
Available to Order
–
Bellows Seal
98
171
66
Normally Closed
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
Single acting
Available to Order
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
–
–
–
–
–
–
Normally Closed
Available to Order
–
–
98
171
66
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Available to Order
–
–
–
–
–
–
–
–
Normally Closed
Available to Order
High vacuum applications
–
–
–
–
Normally Closed
Bellows seal
–
Single acting
Available to Order
–
–
59
108
38
–
–
–
Normally Closed
Available to Order
–
–
–
–
–
–
–
–
–
Available to Order
–
–
74
121
48
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum Angle Valve
–
–
–
–
Normally Closed Bellows Seal
–
–
–
Available to Order