SMC High Vacuum Angle Valve
Product Code: XLA-16G-2...
Available to Order
tech sheet
Details
Seal Material
FKM
Body Material
Aluminium
Actuation
Normally Closed
Manufacturer
SMC
Seal Type
Bellows Seal
Series
XL2
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Operation
Length mm
Width mm
Height mm
Feature
Angle
Actuation
Flange Specification
Ambient Temperature
Valve Material
Buy Price
High Vacuum
Normally Closed
–
–
–
–
–
–
–
–
–
Available to Order
–
–
110
185
79
–
–
–
–
–
–
Available to Order
High Vacuum
Normally Closed Bellows Seal
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications requiring minimal contamination and corrosion resistance
Normally Closed
–
–
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Angle valve
Single acting
KF NW
–
–
Available to Order
–
Normally Closed
98
171
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
Single acting
–
–
–
Available to Order
High Vacuum
Normally Closed Bellows Seal
–
–
–
–
–
–
–
5 to 60°C
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
98
171
66
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
60
108
38
Bellows seal
Angle valve
Single acting
–
5 to 60°C
Aluminium
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
Normally Closed Bellows Seal
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
5 to 60°C
–
Available to Order
–
–
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
High vacuum applications
Normally Closed
–
–
–
Bellows seal
–
Single acting
–
–
–
Available to Order
–
–
59
108
38
–
–
Normally Closed
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
74
121
48
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum Angle Valve
Normally Closed Bellows Seal
–
–
–
–
–
–
–
–
–
Available to Order